X5200 Pneumatic Inker

X5200 saac arm drawing    X5210 optical bridge drawing
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The X5200 series pneumatic inking solutions are designed for Tokyo Electron’s P8 prober. The X5200 series serves the growing number of TEL P8 inking applications in place on test floors around the world.

The X5200 series offers outstanding, reliable high-speed performance, producing up to 12 dots per second. These inkers feature a compact design which is integrated within the prober and does not protrude above the prober’s top surface. The X5200 series incorporates the convenience of the DieMark™ cartridges with the dependability of a pneumatic controller for the ultimate inking solution.

Pneumatic inkers provide a non-invasive approach to marking by eliminating direct contact with the wafer surface. Ink is deposited via pneumatic actuation of the shuttle and a pulse of air into the cartridge reservoir. When the shuttle reaches full downward travel, a drop of ink is deposited on the wafer.

The pneumatic DieMark™ ink cartridges feature a Teflon tube inside of a stainless steel needle. When the cartridge is opened, the needle punctures the reservoir membrane to provide ink flow through the Teflon tube.

Features and Benefits

  • Programmable dot counter
  • Automatic cartridge priming
  • Dot range of 15-50 mil, depending on cartridge size
  • Uses DM-2.3 disposable cartridges, pre-filled, factory tuned and available in A5, A6 and A8 sizes
  • Available inks: Xandex 8103, 8104, 7824 or 7824T and Markem™ 6990, 6993 or 6997
  • The X5200 series can be mounted on the SACC arm, or on the prober’s optical bridge.
  • Cartridge changes are a snap -- simply remove the top knob to change the cartridge.
  • The X5200 is suitable for overhead testing, cabled sort or off-line inking applications

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